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US Patent 7684543 X-ray beam conditioning device and X-ray analysis apparatus

Patent 7684543 was granted and assigned to Rigaku on March, 2010 by the United States Patent and Trademark Office.

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Current Assignee
Rigaku
Rigaku
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7684543
Date of Patent
March 23, 2010
Patent Application Number
11476888
Date Filed
June 29, 2006
Patent Citations Received
‌
US Patent 11781999 Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
Patent Primary Examiner
‌
Edward J. Glick
Patent abstract

An X-ray beam conditioning device that has a crystal holder and a motor is provided. The crystal holder supports a first crystal block and a second crystal block, each of which diffracts X-ray by a specific diffraction angle. The motor can rotate the crystal holder around an axis extending at right angles to a plane including an optical axis of X-ray and can fixedly support the crystal holder at the rotated position. The crystal holder holds the first and second crystal blocks at such angles to each other such that both crystal blocks diffract X-ray. The optical axes of the two crystal blocks can be adjusted by rotating the crystal holder about the axis, that is, the only one axis.

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