US Patent 7651269 Temperature probes having a thermally isolated tip
Patent 7651269 was granted and assigned to Lam Research on January, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 19, 2007
0
Date of Patent
January 26, 2010
0
Patent Application Number
11826941
0
Patent Inventor Names
Keith Comendant
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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