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US Patent 7651269 Temperature probes having a thermally isolated tip

Patent 7651269 was granted and assigned to Lam Research on January, 2010 by the United States Patent and Trademark Office.

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Patent abstract

Temperature probes for measuring the temperature of objects are disclosed. The temperature probes include a housing and a tip in thermal contact with an end of the housing. The tip is adapted to contact a surface of the object whose temperature is to be measured by the temperature probe. A portion of the housing in contact with the tip has a high thermal resistance effective to thermally isolate the tip from an adjacent portion of the housing. A sensor is located inside of the housing and adapted to measure the temperature of the tip.

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Patent Citations Received
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US Patent 11783138 Configuring signal devices in thermal processing systems
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Patent Inventor Names
Keith Comendant0
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Patent Citations Received
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US Patent 11707860 Liquid pressurization pump and systems with data storage
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US Patent 07651269 Temperature probes having a thermally isolated tip US Patent 7651269 Temperature probes having a thermally isolated tip

Infobox
Patent Number
076512690
Patent Number
76512690
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=076512690
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Infobox
Is a
Patent
Patent
0
Current Assignee
Lam Research
Lam Research
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
076512690
Date of Patent
January 26, 2010
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Patent Application Number
118269410
Date Filed
July 19, 2007
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=076512690
Patent Primary Examiner
‌
Gail Verbitsky
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07651269
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 US Patent 07651269 Temperature probes having a thermally isolated tip

Infobox
Is a
Patent
Patent
Current assignee
Lam Research
Lam Research
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07651269
Date of patent
January 26, 2010
Patent application number
11826941
Date Filed
July 19, 2007
Patent primary examiner
‌
Gail Verbitsky

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