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US Patent 7651269 Temperature probes having a thermally isolated tip

Patent 7651269 was granted and assigned to Lam Research on January, 2010 by the United States Patent and Trademark Office.

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Patent
Patent
1

Patent attributes

Current Assignee
Lam Research
Lam Research
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
76512691
Patent Inventor Names
Keith Comendant1
Date of Patent
January 26, 2010
1
Patent Application Number
118269411
Date Filed
July 19, 2007
1
Patent Citations Received
‌
US Patent 11783138 Configuring signal devices in thermal processing systems
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US Patent 11707860 Liquid pressurization pump and systems with data storage
2
Patent Primary Examiner
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Gail Verbitsky
1
Patent abstract

Temperature probes for measuring the temperature of objects are disclosed. The temperature probes include a housing and a tip in thermal contact with an end of the housing. The tip is adapted to contact a surface of the object whose temperature is to be measured by the temperature probe. A portion of the housing in contact with the tip has a high thermal resistance effective to thermally isolate the tip from an adjacent portion of the housing. A sensor is located inside of the housing and adapted to measure the temperature of the tip.

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