US Patent 7633074 Arrangement and method for compensating emitter tip vibrations
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Patent Inventor Names
Jürgen Frosien0
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Patent abstract
A charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip and a supporting member for supporting the emitter is provided. Further, the apparatus includes an emitter location measuring device for repeatedly measuring the location of the emitter and a deflector system for compensating variations in the location of the emitter.
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US Patent 07633074 Arrangement and method for compensating emitter tip vibrations US Patent 7633074 Arrangement and method for compensating emitter tip vibrations
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Patent Number
07633074
Patent Number
7633074
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US Patent 07633074 Arrangement and method for compensating emitter tip vibrations
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Patent jurisdiction
Patent number
07633074
Date of patent
December 15, 2009
Patent application number
11582848
Date Filed
October 18, 2006
Patent primary examiner
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