Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jürgen Frosien0
Date of Patent
December 15, 2009
Patent Application Number
11582848
Date Filed
October 18, 2006
Patent Primary Examiner
Patent abstract
A charged particle beam apparatus with a charged particle beam source including an emitter with an emitter tip and a supporting member for supporting the emitter is provided. Further, the apparatus includes an emitter location measuring device for repeatedly measuring the location of the emitter and a deflector system for compensating variations in the location of the emitter.
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