Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
October 20, 2009
Patent Application Number
11544130
Date Filed
October 5, 2006
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus and technique for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work is described.
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