Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshio Masuda0
Kenji Tamaki0
Natsuyo Morioka0
Shoji Ikuhara0
Akira Kagoshima0
Hideyuki Yamamoto0
Hiroyuki Kitsunai0
Junichi Tanaka0
Date of Patent
October 13, 2009
Patent Application Number
11346298
Date Filed
February 3, 2006
Patent Primary Examiner
Patent abstract
A plasma processing system includes a first unit for plasma-processing a sample based on a recipe for plasma processing, and a second unit for modifying the recipe in accordance with a monitored value obtained during the plasma processing of the sample in the first unit. A next sample is plasma processed in the first unit based on the modified recipe.
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