Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshio Masuda1
Kenji Tamaki1
Natsuyo Morioka1
Shoji Ikuhara1
Akira Kagoshima1
Hideyuki Yamamoto1
Hiroyuki Kitsunai1
Junichi Tanaka1
Date of Patent
October 13, 2009
Patent Application Number
11346298
Date Filed
February 3, 2006
Patent Primary Examiner
Patent abstract
A plasma processing system includes a first unit for plasma-processing a sample based on a recipe for plasma processing, and a second unit for modifying the recipe in accordance with a monitored value obtained during the plasma processing of the sample in the first unit. A next sample is plasma processed in the first unit based on the modified recipe.
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