Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shuichi Yasuda0
Masanobu Sato0
Sadao Hirae0
Date of Patent
October 13, 2009
Patent Application Number
12397632
Date Filed
March 4, 2009
Patent Primary Examiner
Patent abstract
A substrate treatment method including the steps of: generating droplets of a treatment liquid by mixing the treatment liquid with a gas; and causing the treatment liquid droplets generated in the liquid droplet generating step to impinge on a surface of a substrate being treated. The treatment liquid droplets have a volume median diameter of 5 μm to 40 μm.
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