Patent 7598595 was granted and assigned to Industrial Technology Research Institute on October, 2009 by the United States Patent and Trademark Office.
A nanoporous antireflection coating preparation method. A sol-gel precursor solution containing an organic template is coated onto a substrate. The sol-gel precursor solution containing the organic template is dried into a film. The organic template within the film is then removed to form a nanoporous antireflection coating. In preferred embodiments, the organic template is removed by UV—O3 treatment at ambient temperature.