Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shu Fang Chen0
Kuei-jung Chao0
Kuo-ying Huang0
Date of Patent
October 6, 2009
Patent Application Number
11453932
Date Filed
June 16, 2006
Patent Primary Examiner
Patent abstract
A nanoporous antireflection coating preparation method. A sol-gel precursor solution containing an organic template is coated onto a substrate. The sol-gel precursor solution containing the organic template is dried into a film. The organic template within the film is then removed to form a nanoporous antireflection coating. In preferred embodiments, the organic template is removed by UV—O3 treatment at ambient temperature.
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