US Patent 7597816 Wafer bevel polymer removal
Patent 7597816 was granted and assigned to Lam Research on October, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 3, 2004
Date of Patent
October 6, 2009
Patent Application Number
10934081
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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