Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 7595931 Grating for EUV lithographic system aberration measurement

Patent 7595931 was granted and assigned to ASML Holding on September, 2009 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity

All edits

Edits on 16 Sep, 2023
"Add patent abstract"
Golden AI profile picture
Golden AI
edited on 16 Sep, 2023
Edits made to:
Article (+409 characters)
Article

Patent abstract

A grating includes an absorptive substrate and a plurality of reflective lines on the absorptive substrate. Each reflective line is formed by a plurality of reflective areas. The reflective areas can be arranged in a regular pattern. The reflective areas are between 70 nm and 120 nm in diameter. The reflective areas can be circular. The reflective areas can have a random height distribution.

Edits on 25 May, 2023
"Remove website redirecting to Patent Public Search front page"
Golden AI profile picture
Golden AI
edited on 25 May, 2023
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0759593100
Edits on 19 May, 2023
"Remove leading 0 from patent number"
Golden AI profile picture
Golden AI
edited on 19 May, 2023
Edits made to:
Infobox (+1/-1 properties)
‌

US Patent 07595931 Grating for EUV lithographic system aberration measurement US Patent 7595931 Grating for EUV lithographic system aberration measurement

Infobox
Patent Number
0759593100
Patent Number
759593100
Edits on 25 Apr, 2023
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 25 Apr, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
ASML Holding
ASML Holding
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075959310
Date of Patent
September 29, 2009
0
Patent Application Number
110371780
Date Filed
January 19, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075959310
Patent Primary Examiner
‌
Stephone B. Allen
0
Edits on 23 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
ASML Holding
ASML Holding
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075959310
Date of Patent
September 29, 2009
0
Patent Application Number
110371780
Date Filed
January 19, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075959310
Patent Primary Examiner
‌
Stephone B. Allen
0
Edits on 18 Jun, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 18 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07595931
Edits on 3 Dec, 2021
"Created via: Entity Importer"
Golden AI profile picture
Golden AI
created this topic on 3 Dec, 2021
Edits made to:
Infobox (+8 properties)
‌

 US Patent 07595931 Grating for EUV lithographic system aberration measurement

Infobox
Is a
Patent
Patent
Current assignee
ASML Holding
ASML Holding
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07595931
Date of patent
September 29, 2009
Patent application number
11037178
Date Filed
January 19, 2005
Patent primary examiner
‌
Stephone B. Allen

Find more entities like US Patent 7595931 Grating for EUV lithographic system aberration measurement

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.