Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert J. Hanson0
Terry McDaniel0
Alex Schrinsky0
Date of Patent
September 29, 2009
0Patent Application Number
122748240
Date Filed
November 20, 2008
0Patent Primary Examiner
Patent abstract
A process and apparatus directed to forming a terraced film stack of a semiconductor device, for example, a DRAM memory device, is disclosed. The present invention addresses etch undercut resulting from materials of different etch selectivity used in the film stack, which if not addressed can cause device failure.
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