US Patent 7591270 Process solutions containing surfactants
Patent 7591270 was granted and assigned to AIR PRODUCTS AND CHEMICALS, INC. on September, 2009 by the United States Patent and Trademark Office.
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Patent Inventor Names
Danielle Megan King Curzi0
Eugene Joseph Karwacki, Jr.0
Leslie Cox Barber0
Peng Zhang0
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Patent abstract
Process solutions comprising one or more surfactants are used to reduce the number of pattern collapse defects on a plurality of photoresist coated substrates during the manufacture of semiconductor devices.
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US Patent 07591270 Process solutions containing surfactants US Patent 7591270 Process solutions containing surfactants
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Patent Number
07591270
Patent Number
7591270
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Official Website
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US Patent 07591270 Process solutions containing surfactants
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Is a
Current assignee
Patent jurisdiction
Patent number
07591270
Date of patent
September 22, 2009
Patent application number
11520971
Date Filed
September 14, 2006
Patent primary examiner
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