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US Patent 7582514 Microelectromechanical systems encapsulation process with anti-stiction coating

Patent 7582514 was granted and assigned to Bosch (company) on September, 2009 by the United States Patent and Trademark Office.

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Patent Inventor Names
Brian Stark0
Cyril Vancura0
Franz Laermer0
Markus Ulm0
Matthias Metz0
Silvia Kronmueller0
Tino Fuchs0
Edits on 16 Sep, 2023
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Patent abstract

An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450° C. is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.

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edited on 25 May, 2023
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US Patent 07582514 Microelectromechanical systems encapsulation process with anti-stiction coating US Patent 7582514 Microelectromechanical systems encapsulation process with anti-stiction coating

Infobox
Patent Number
075825140
Patent Number
75825140
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edited on 24 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075825140
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Katrina-Kay Pettitt
edited on 21 May, 2023
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Patent Applicant
Bosch
Bosch
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"prospector:2752:3119976"
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Katrina-Kay Pettitt
edited on 17 May, 2023
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Current Assignee
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Robert Bosch
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Current Assignee
Bosch
Bosch
Patent Applicant
Bosch
Bosch
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"Entity importer update"
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edited on 27 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
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Robert Bosch
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075825140
Date of Patent
September 1, 2009
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Patent Application Number
118448440
Date Filed
August 24, 2007
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075825140
Patent Primary Examiner
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Thao P. Le
0
Edits on 18 Jun, 2022
"Entity importer update"
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Golden AI
edited on 18 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07582514
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 US Patent 07582514 Microelectromechanical systems encapsulation process with anti-stiction coating

Infobox
Is a
Patent
Patent
Current assignee
‌
Robert Bosch
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07582514
Date of patent
September 1, 2009
Patent application number
11844844
Date Filed
August 24, 2007
Patent primary examiner
‌
Thao P. Le

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