US Patent 7582514 Microelectromechanical systems encapsulation process with anti-stiction coating

Patent 7582514 was granted and assigned to Bosch (company) on September, 2009 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Bosch

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

75825140

Patent Inventor Names

Franz Laermer0

Matthias Metz0

Markus Ulm0

Tino Fuchs0

Silvia Kronmueller0

Brian Stark0

Cyril Vancura0

Date of Patent

September 1, 2009

Patent Application Number

118448440

Date Filed

August 24, 2007

Patent Primary Examiner

‌

Thao P. Le

Patent abstract

An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450° C. is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.

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