US Patent 7559557 Sealing between vacuum chambers
Patent 7559557 was granted and assigned to Varian Semiconductor Equipment Associates on July, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 22, 2007
0
Date of Patent
July 14, 2009
0
Patent Application Number
11894979
0
Patent Inventor Names
Gregory D. Thronson
0
Jeffrey A. Burgess
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7559557 Sealing between vacuum chambers
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
By using this site, you agree to our Terms of Service.