US Patent 7559557 Sealing between vacuum chambers
Patent 7559557 was granted and assigned to Varian Semiconductor Equipment Associates on July, 2009 by the United States Patent and Trademark Office.
All edits
A sealing system is disclosed. One such sealing system includes a first vacuum chamber and a second vacuum chamber. The sealing system includes a first sealing unit having a proximal end and a distal end, the proximal end of the first sealing unit disposed on the first vacuum chamber. The sealing system includes a second sealing unit having a distal end and a proximal end, the distal end of the second sealing unit disposed on the distal end of the first sealing unit and the proximal end of the second sealing unit disposed on the second vacuum chamber. One of the sealing units is concave, while the other is convex. The sealing system also includes a first o-ring, a second o-ring, and a third o-ring.
US Patent 07559557 Sealing between vacuum chambers US Patent 7559557 Sealing between vacuum chambers
US Patent 07559557 Sealing between vacuum chambers
Find more entities like US Patent 7559557 Sealing between vacuum chambers
