Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steven T. Fink0
Date of Patent
June 30, 2009
0Patent Application Number
110065440
Date Filed
December 8, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus related to plasma chambers used for processing semiconductor substrates and specifically to improvements in pumping baffle plates used in plasma sources. An apparatus and method for making a baffle plate assembly formed from a modified baffle plate blank wherein a variety of pumping features are formed in the baffle plate blank and opened in a planar material removal operation.
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