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US Patent 7551979 Robot calibration system and method

Patent 7551979 was granted and assigned to Strasbaugh on June, 2009 by the United States Patent and Trademark Office.

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Patent Inventor Names
Daniel P. Saraliev0
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Article

Patent abstract

A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system programmed with a calibration routine. The calibration array has an plurality of inductive proximity sensors to determine parallelism of the robot relative to a station and a center locating sensor to determine the center of the station.

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US Patent 07551979 Robot calibration system and method US Patent 7551979 Robot calibration system and method

Infobox
Patent Number
075519790
Patent Number
75519790
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075519790
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Infobox
Is a
Patent
Patent
0
Current Assignee
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Strasbaugh
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075519790
Date of Patent
June 23, 2009
0
Patent Application Number
116009780
Date Filed
November 17, 2006
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075519790
Patent Primary Examiner
‌
Khoi H Tran
0
Edits on 15 Jun, 2022
"Entity importer update"
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07551979
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 US Patent 07551979 Robot calibration system and method

Infobox
Is a
Patent
Patent
Current assignee
‌
Strasbaugh
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07551979
Date of patent
June 23, 2009
Patent application number
11600978
Date Filed
November 17, 2006
Patent primary examiner
‌
Khoi H Tran

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