Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Daniel P. Saraliev0
Date of Patent
June 23, 2009
0Patent Application Number
116009780
Date Filed
November 17, 2006
0Patent Primary Examiner
Patent abstract
A robot calibration system and method for robots in semiconductor wafer processing systems is disclosed. The calibration system comprises a calibration array, a dummy wafer and a control system programmed with a calibration routine. The calibration array has an plurality of inductive proximity sensors to determine parallelism of the robot relative to a station and a center locating sensor to determine the center of the station.
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