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US Patent 7550371 Method of producing SIMOX wafer

Patent 7550371 was granted and assigned to SUMCO on June, 2009 by the United States Patent and Trademark Office.

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Patent abstract

A SIMOX wafer is produced by implanting an oxygen ions into a surface of a Si substrate and then conducting a high-temperature annealing, in which an atmosphere in at least an end stage of the high-temperature annealing treatment is an Ar or N2 atmosphere containing an oxygen of more than 3 volume % but not more than 10 volume %.

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edited on 22 May, 2023
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US Patent 07550371 Method of producing SIMOX wafer US Patent 7550371 Method of producing SIMOX wafer

Infobox
Patent Number
0755037100
Patent Number
755037100
Edits on 18 May, 2023
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Golden AI
edited on 18 May, 2023
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Infobox
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0755037100
Edits on 21 Mar, 2023
"Entity importer update"
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edited on 21 Mar, 2023
Infobox
Is a
Patent
Patent
0
Current Assignee
SUMCO
SUMCO
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075503710
Date of Patent
June 23, 2009
0
Patent Application Number
117292920
Date Filed
March 27, 2007
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075503710
Patent Primary Examiner
‌
Alexander G Ghyka
0
Edits on 23 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
SUMCO
SUMCO
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
075503710
Date of Patent
June 23, 2009
0
Patent Application Number
117292920
Date Filed
March 27, 2007
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=075503710
Patent Primary Examiner
‌
Alexander G Ghyka
0
Edits on 15 Jun, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 15 Jun, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07550371
Edits on 2 Dec, 2021
"Created via: Entity Importer"
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Golden AI
created this topic on 2 Dec, 2021
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 US Patent 07550371 Method of producing SIMOX wafer

Infobox
Is a
Patent
Patent
Current assignee
SUMCO
SUMCO
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07550371
Date of patent
June 23, 2009
Patent application number
11729292
Date Filed
March 27, 2007
Patent primary examiner
‌
Alexander G Ghyka

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