US Patent 7531415 Multilayered CMP stop for flat planarization

Patent 7531415 was granted and assigned to Texas Instruments on May, 2009 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Texas Instruments

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7531415

Patent Inventor Names

Siang Ping Kwok0

Date of Patent

May 12, 2009

Patent Application Number

10948472

Date Filed

September 23, 2004

Patent Primary Examiner

‌

Chuong A Luu

Patent abstract

A three layer film (116/114/112), such as nitride/oxide/nitride for a CMP stop layer (110). A gap filling material (120) is polished, stopping on the first film (112). The first film (112) is then stripped using an etch chemistry that is selective against removing the second film (114). CMP is then continued stopping on the third film (116).