Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
March 31, 2009
Patent Application Number
11300657
Date Filed
December 12, 2005
Patent Primary Examiner
Patent abstract
The present invention is directed to the preparation of photoresist polymers via living free radical polymerization techniques. Sterically bulky ester monomers are utilized as the polymerization components. Use of chain transfer agents is included in polymerization processing conditions. Cleavage of polymer terminal end groups that include a heteroatom are described.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
