US Patent 7494545 Epitaxial deposition process and apparatus
Patent 7494545 was granted and assigned to Applied Materials on February, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 3, 2006
Date of Patent
February 24, 2009
Patent Application Number
11346804
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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