US Patent 7488681 Method for fabricating Al metal line
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Patent Inventor Names
Cheon Man Shim0
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Patent abstract
Disclosed is a method for fabricating an Al metal line. The method includes forming an insulating layer on a semiconductor substrate; forming a Ti layer, a bottom TiN layer, an Al layer and a top TiN layer in successive order on the insulating layer; plasma-treating the top TiN layer; forming a photoresist pattern on the plasma-treated top TiN layer; and etching the plasma-treated top TiN layer, the Al layer, the bottom TiN layer, and the Ti layer using the photoresist pattern as an etching mask, thereby forming the Al metal line.
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US Patent 07488681 Method for fabricating Al metal line US Patent 7488681 Method for fabricating Al metal line
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Patent Number
074886810
Patent Number
74886810
Edits on 30 Mar, 2023
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Patent Jurisdiction
Patent Number
074886810
Date of Patent
February 10, 2009
0Patent Application Number
115048270
Date Filed
August 14, 2006
0Official Website
Patent Primary Examiner
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US Patent 07488681 Method for fabricating Al metal line
Infobox
Is a
Patent jurisdiction
Patent number
07488681
Date of patent
February 10, 2009
Patent application number
11504827
Date Filed
August 14, 2006
Patent primary examiner
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