Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Cheon Man Shim0
Date of Patent
February 10, 2009
0Patent Application Number
115048270
Date Filed
August 14, 2006
0Patent Primary Examiner
Patent abstract
Disclosed is a method for fabricating an Al metal line. The method includes forming an insulating layer on a semiconductor substrate; forming a Ti layer, a bottom TiN layer, an Al layer and a top TiN layer in successive order on the insulating layer; plasma-treating the top TiN layer; forming a photoresist pattern on the plasma-treated top TiN layer; and etching the plasma-treated top TiN layer, the Al layer, the bottom TiN layer, and the Ti layer using the photoresist pattern as an etching mask, thereby forming the Al metal line.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
