Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Terry McDaniel0
Alex Schrinsky0
Robert J. Hanson0
Date of Patent
January 6, 2009
0Patent Application Number
117575940
Date Filed
June 4, 2007
0Patent Primary Examiner
Patent abstract
A process directed to forming a terraced film stack of a semiconductor device, for example, a DRAM memory device, is disclosed. The present invention addresses etch undercut resulting from materials of different etch selectivity used in the film stack, which if not addressed can cause device failure.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
