US Patent 7470500 Organic bottom antireflective polymer compositions
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Patent Inventor Names
Huirong Yao0
Shuji S. Ding-Lee0
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Patent abstract
The present invention relates to bottom antireflective coating compositions, polymers useful in making such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating.
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US Patent 07470500 Organic bottom antireflective polymer compositions US Patent 7470500 Organic bottom antireflective polymer compositions
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Patent Number
074705000
Patent Number
74705000
Edits on 18 May, 2023
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Official Website
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Patent Jurisdiction
Patent Number
074705000
Date of Patent
December 30, 2008
0Patent Application Number
111845930
Date Filed
July 19, 2005
0Official Website
Patent Primary Examiner
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US Patent 07470500 Organic bottom antireflective polymer compositions
Infobox
Is a
Patent jurisdiction
Patent number
07470500
Date of patent
December 30, 2008
Patent application number
11184593
Date Filed
July 19, 2005
Patent primary examiner
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