Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Huirong Yao0
Shuji S. Ding-Lee0
Date of Patent
December 30, 2008
0Patent Application Number
111845930
Date Filed
July 19, 2005
0Patent Primary Examiner
Patent abstract
The present invention relates to bottom antireflective coating compositions, polymers useful in making such compositions, and their use in image processing by forming a thin layer between a reflective substrate and a photoresist coating.
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