US Patent 7457098 Electrostatic chuck
Patent 7457098 was granted and assigned to Kyocera Corporation on November, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 25, 2007
0
Date of Patent
November 25, 2008
0
Patent Application Number
11768116
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Patent Citations Received
Patent Inventor Names
Tsunehiko Nakamura
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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