US Patent 7445675 Sensor for monitoring material deposition
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Patent Inventor Names
Chang Liu0
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Patent abstract
A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.
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US Patent 07445675 Sensor for monitoring material deposition US Patent 7445675 Sensor for monitoring material deposition
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Patent Number
07445675
Patent Number
7445675
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Official Website
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US Patent 07445675 Sensor for monitoring material deposition
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Is a
Patent jurisdiction
Patent number
07445675
Date of patent
November 4, 2008
Patent application number
11047109
Date Filed
January 31, 2005
Patent primary examiner
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