Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chang Liu0
Date of Patent
November 4, 2008
Patent Application Number
11047109
Date Filed
January 31, 2005
Patent Primary Examiner
Patent abstract
A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.
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