US Patent 7439607 Beta control using a rapid thermal oxidation
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Patent Inventor Names
Arne W. Ballantine0
Douglas D. Coolbaugh0
Steve S. Williams0
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Patent abstract
A method of forming semiconductor device treating a surface of a substrate to produce a discontinuous growth of a material on the surface through rapid thermal oxidation of the substrate surface at a temperature of less than about 700° C.
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US Patent 07439607 Beta control using a rapid thermal oxidation US Patent 7439607 Beta control using a rapid thermal oxidation
Infobox
Patent Number
074396070
Patent Number
74396070
Edits on 23 Sep, 2022
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Patent Jurisdiction
Patent Number
074396070
Date of Patent
October 21, 2008
0Patent Application Number
112462980
Date Filed
October 11, 2005
0Official Website
Patent Primary Examiner
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US Patent 07439607 Beta control using a rapid thermal oxidation
Infobox
Is a
Patent jurisdiction
Patent number
07439607
Date of patent
October 21, 2008
Patent application number
11246298
Date Filed
October 11, 2005
Patent primary examiner
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