Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Steve S. Williams0
Arne W. Ballantine0
Douglas D. Coolbaugh0
Date of Patent
October 21, 2008
0Patent Application Number
112462980
Date Filed
October 11, 2005
0Patent Primary Examiner
Patent abstract
A method of forming semiconductor device treating a surface of a substrate to produce a discontinuous growth of a material on the surface through rapid thermal oxidation of the substrate surface at a temperature of less than about 700° C.
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