Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mark Shepheard0
James Heskin0
Julia Lafoy0
Date of Patent
September 16, 2008
Patent Application Number
10640438
Date Filed
August 13, 2003
Patent Primary Examiner
Patent abstract
Photolithography operation in a wafer fab using relative weightings of work in progress to iteratively schedule wafers.
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