Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 9, 2008
Patent Application Number
11518320
Date Filed
September 8, 2006
Patent Primary Examiner
Patent abstract
In one embodiment, an atomic force microscope comprises a frame, a beam coupled to the frame at a first end and a second end, a probe mounted to the beam, means for inducing relative motion between the beam and an underlying surface, and means for detecting a characteristic of the beam.
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