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US Patent 7422681 Substrate treating apparatus

Patent 7422681 was granted and assigned to Dainippon Screen Mfg Co on September, 2008 by the United States Patent and Trademark Office.

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Patent Inventor Names
Akira Morita0
Tadashi Maegawa0
Toshio Hiroe0
Yoshitaka Abiko0
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Patent abstract

A substrate treating apparatus for treating substrates having a film coating. The apparatus includes a treating unit for treating the substrates with a treating solution, a drain pipe for draining the treating solution from the treating unit, a filter mounted on the drain pipe, and an ultraviolet emitting unit for the filter for emitting ultraviolet light to the treating solution flowing through the filter.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=074226810
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US Patent 07422681 Substrate treating apparatus US Patent 7422681 Substrate treating apparatus

Infobox
Patent Number
074226810
Patent Number
74226810
Edits on 22 Sep, 2022
"Entity importer update"
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Golden AI
edited on 22 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
Dainippon Screen Mfg Co
Dainippon Screen Mfg Co
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
074226810
Date of Patent
September 9, 2008
0
Patent Application Number
111215190
Date Filed
May 4, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=074226810
Patent Primary Examiner
‌
Fred Prince
0
Edits on 14 Jun, 2022
"Entity importer update"
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edited on 14 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07422681
Edits on 1 Dec, 2021
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created this topic on 1 Dec, 2021
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 US Patent 07422681 Substrate treating apparatus

Infobox
Is a
Patent
Patent
Current assignee
Dainippon Screen Mfg Co
Dainippon Screen Mfg Co
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07422681
Date of patent
September 9, 2008
Patent application number
11121519
Date Filed
May 4, 2005
Patent primary examiner
‌
Fred Prince

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