Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yoshitaka Abiko0
Akira Morita0
Tadashi Maegawa0
Toshio Hiroe0
Date of Patent
September 9, 2008
0Patent Application Number
111215190
Date Filed
May 4, 2005
0Patent Primary Examiner
Patent abstract
A substrate treating apparatus for treating substrates having a film coating. The apparatus includes a treating unit for treating the substrates with a treating solution, a drain pipe for draining the treating solution from the treating unit, a filter mounted on the drain pipe, and an ultraviolet emitting unit for the filter for emitting ultraviolet light to the treating solution flowing through the filter.
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