US Patent 7371332 Uniform etch system
Patent 7371332 was granted and assigned to Lam Research on May, 2008 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 14, 2003
Date of Patent
May 13, 2008
Patent Application Number
10642083
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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