US Patent 7365101 Dispersion of pyrogenically produced cerium oxide
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Patent Inventor Names
Günther Michael0
Michael Kröll0
Rainer Hahn0
Ralph Brandes0
Stefan Heberer0
Stipan Katusic0
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Patent abstract
A dispersion of pyrogenically produced cerium oxide, which does not contain any particles larger than 1 μm, is produced by dispersing a pyrogenically produced cerium oxide in water by means of a dissolver, centrifuging it, separating the supernatant from the bottom product, and again dispersing the supernatant by means of ultrasound. The dispersion can be used for chemical-mechanical polishing (CMP).
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US Patent 07365101 Dispersion of pyrogenically produced cerium oxide US Patent 7365101 Dispersion of pyrogenically produced cerium oxide
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Patent Number
073651010
Patent Number
73651010
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Patent Jurisdiction
Patent Number
073651010
Date of Patent
April 29, 2008
0Patent Application Number
109416500
Date Filed
September 15, 2004
0Official Website
Patent Primary Examiner
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US Patent 07365101 Dispersion of pyrogenically produced cerium oxide
Infobox
Is a
Patent jurisdiction
Patent number
07365101
Date of patent
April 29, 2008
Patent application number
10941650
Date Filed
September 15, 2004
Patent primary examiner
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