Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Günther Michael0
Ralph Brandes0
Stefan Heberer0
Stipan Katusic0
Michael Kröll0
Rainer Hahn0
Date of Patent
April 29, 2008
0Patent Application Number
109416500
Date Filed
September 15, 2004
0Patent Primary Examiner
Patent abstract
A dispersion of pyrogenically produced cerium oxide, which does not contain any particles larger than 1 μm, is produced by dispersing a pyrogenically produced cerium oxide in water by means of a dissolver, centrifuging it, separating the supernatant from the bottom product, and again dispersing the supernatant by means of ultrasound. The dispersion can be used for chemical-mechanical polishing (CMP).
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