US Patent 7340087 Edge inspection
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Patent abstract
A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
Edits on 4 Aug, 2023
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Patent Jurisdiction
Patent Number
73400870
Date of Patent
March 4, 2008
0Patent Application Number
108907620
Date Filed
July 14, 2004
0Patent Primary Examiner
Edits on 25 May, 2023
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US Patent 07340087 Edge inspection US Patent 7340087 Edge inspection
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Patent Number
0734008700
Patent Number
734008700
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Edits on 21 Mar, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073400870
Date of Patent
March 4, 2008
0Patent Application Number
108907620
Date Filed
July 14, 2004
0Official Website
Patent Primary Examiner
Edits on 22 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
073400870
Date of Patent
March 4, 2008
0Patent Application Number
108907620
Date Filed
July 14, 2004
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
Golden AI
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Edits on 23 Nov, 2021
Golden AI
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US Patent 07340087 Edge inspection
Infobox
Is a
Patent jurisdiction
Patent number
07340087
Date of patent
March 4, 2008
Patent application number
10890762
Date Filed
July 14, 2004
Patent primary examiner
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