Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 4, 2008
0Patent Application Number
108907620
Date Filed
July 14, 2004
0Patent Primary Examiner
Patent abstract
A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.
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