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US Patent 7338740 Positive resist composition

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Patent abstract

A positive resist composition comprising (A) a resin comprising at least one kind of acrylate derivative repeating units, repeating units having lactone structures and repeating units having hydroxy group-substituted adamantane structures, having a glass transition temperature in the range of 70 to 155° C. and capable of increasing its solubility in an alkali developer under action of an acid, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and (C) an organic solvent.

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US Patent 07338740 Positive resist composition US Patent 7338740 Positive resist composition

Infobox
Patent Number
0733874000
Patent Number
733874000
Edits on 18 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0733874000
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edited on 25 Apr, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
073387400
Date of Patent
March 4, 2008
0
Patent Application Number
108093890
Date Filed
March 26, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073387400
Patent Primary Examiner
‌
Amanda C. Walke
0
Edits on 25 Sep, 2022
"Entity importer update"
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Golden AI
edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
073387400
Date of Patent
March 4, 2008
0
Patent Application Number
108093890
Date Filed
March 26, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073387400
Patent Primary Examiner
‌
Amanda C. Walke
0
Edits on 17 Jun, 2022
"Entity importer update"
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Golden AI
edited on 17 Jun, 2022
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Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07338740
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Golden AI
created this topic on 23 Nov, 2021
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 US Patent 07338740 Positive resist composition

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07338740
Date of patent
March 4, 2008
Patent application number
10809389
Date Filed
March 26, 2004
Patent primary examiner
‌
Amanda C. Walke

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