Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 4, 2008
Patent Application Number
10809389
Date Filed
March 26, 2004
Patent Primary Examiner
Patent abstract
A positive resist composition comprising (A) a resin comprising at least one kind of acrylate derivative repeating units, repeating units having lactone structures and repeating units having hydroxy group-substituted adamantane structures, having a glass transition temperature in the range of 70 to 155° C. and capable of increasing its solubility in an alkali developer under action of an acid, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, and (C) an organic solvent.
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