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US Patent 7323385 Method of fabricating flash memory device

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Patent abstract

A method of fabricating flash memory devices includes the steps of forming a stop nitride film and an oxide film on a semiconductor substrate having a predetermined structure formed therein, forming trenches in the oxide film and the stop nitride film, forming barrier oxide films on lateral faces of the trenches by an atomic layer deposition method, and forming bit lines within the trenches.

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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
73233850
Date of Patent
January 29, 2008
0
Patent Application Number
112949150
Date Filed
December 6, 2005
0
Patent Primary Examiner
‌
Jack Chen
0
Edits on 14 Jul, 2023
"Remove leading 0 from patent number"
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edited on 14 Jul, 2023
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US Patent 07323385 Method of fabricating flash memory device US Patent 7323385 Method of fabricating flash memory device

Infobox
Patent Number
0732338500
Patent Number
732338500
Edits on 24 May, 2023
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Golden AI
edited on 24 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0732338500
Edits on 25 Mar, 2023
"Entity importer update"
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Golden AI
edited on 25 Mar, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
073233850
Date of Patent
January 29, 2008
0
Patent Application Number
112949150
Date Filed
December 6, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073233850
Patent Primary Examiner
‌
Jack Chen
0
Edits on 22 Sep, 2022
"Entity importer update"
Golden AI profile picture
Golden AI
edited on 22 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
073233850
Date of Patent
January 29, 2008
0
Patent Application Number
112949150
Date Filed
December 6, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073233850
Patent Primary Examiner
‌
Jack Chen
0
Edits on 17 Jun, 2022
"Entity importer update"
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Golden AI
edited on 17 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07323385
Edits on 23 Nov, 2021
"Created via: Entity Importer"
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created this topic on 23 Nov, 2021
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 US Patent 07323385 Method of fabricating flash memory device

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07323385
Date of patent
January 29, 2008
Patent application number
11294915
Date Filed
December 6, 2005
Patent primary examiner
‌
Jack Chen

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