Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 29, 2008
0Patent Application Number
112949150
Date Filed
December 6, 2005
0Patent Primary Examiner
Patent abstract
A method of fabricating flash memory devices includes the steps of forming a stop nitride film and an oxide film on a semiconductor substrate having a predetermined structure formed therein, forming trenches in the oxide film and the stop nitride film, forming barrier oxide films on lateral faces of the trenches by an atomic layer deposition method, and forming bit lines within the trenches.
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