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US Patent 7301157 Cluster tool for microscopic processing of samples

Patent 7301157 was granted and assigned to FEI Company on November, 2007 by the United States Patent and Trademark Office.

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Edits on 16 Sep, 2023
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Patent Inventor Names
Bart Buijsse0
Bernardus Jacobus Marie Bormans0
Hendrik Gezinus Tappel0
Hendrik Nicolaas Slingerland0
Mark Theo Meuwese0
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Patent abstract

A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073011570
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edited on 17 May, 2023
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US Patent 07301157 Cluster tool for microscopic processing of samples US Patent 7301157 Cluster tool for microscopic processing of samples

Infobox
Patent Number
073011570
Patent Number
73011570
Edits on 25 Sep, 2022
"Entity importer update"
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Golden AI
edited on 25 Sep, 2022
Infobox
Is a
Patent
Patent
0
Current Assignee
FEI Company
FEI Company
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
073011570
Date of Patent
November 27, 2007
0
Patent Application Number
112374750
Date Filed
September 28, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073011570
Patent Primary Examiner
0
Edits on 17 Jun, 2022
"Entity importer update"
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edited on 17 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07301157
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created this topic on 23 Nov, 2021
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 US Patent 07301157 Cluster tool for microscopic processing of samples

Infobox
Is a
Patent
Patent
Current assignee
FEI Company
FEI Company
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07301157
Date of patent
November 27, 2007
Patent application number
11237475
Date Filed
September 28, 2005
Patent primary examiner

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